JPH0525809Y2 - - Google Patents

Info

Publication number
JPH0525809Y2
JPH0525809Y2 JP1986170958U JP17095886U JPH0525809Y2 JP H0525809 Y2 JPH0525809 Y2 JP H0525809Y2 JP 1986170958 U JP1986170958 U JP 1986170958U JP 17095886 U JP17095886 U JP 17095886U JP H0525809 Y2 JPH0525809 Y2 JP H0525809Y2
Authority
JP
Japan
Prior art keywords
gear
liquid supply
carrier
sun gear
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986170958U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6376457U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986170958U priority Critical patent/JPH0525809Y2/ja
Publication of JPS6376457U publication Critical patent/JPS6376457U/ja
Application granted granted Critical
Publication of JPH0525809Y2 publication Critical patent/JPH0525809Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986170958U 1986-11-06 1986-11-06 Expired - Lifetime JPH0525809Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986170958U JPH0525809Y2 (en]) 1986-11-06 1986-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986170958U JPH0525809Y2 (en]) 1986-11-06 1986-11-06

Publications (2)

Publication Number Publication Date
JPS6376457U JPS6376457U (en]) 1988-05-20
JPH0525809Y2 true JPH0525809Y2 (en]) 1993-06-29

Family

ID=31106152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986170958U Expired - Lifetime JPH0525809Y2 (en]) 1986-11-06 1986-11-06

Country Status (1)

Country Link
JP (1) JPH0525809Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08128Y2 (ja) * 1989-03-30 1996-01-10 東芝機械株式会社 両面研磨機
JP5501556B2 (ja) * 2007-06-27 2014-05-21 Ｈｏｙａ株式会社 磁気ディスク用ガラス基板の製造方法及び磁気ディスクの製造方法並びに研磨装置
JP2009039827A (ja) * 2007-08-09 2009-02-26 Fujitsu Ltd 研磨装置、基板及び電子機器の製造方法
JP2019069499A (ja) * 2017-10-11 2019-05-09 株式会社ファインサーフェス技術 研磨装置、研磨方法、及び研磨キャリア

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5775961U (en]) * 1980-10-30 1982-05-11

Also Published As

Publication number Publication date
JPS6376457U (en]) 1988-05-20

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